Combinatorial RF Biasing for Selectable Spot-Site Isolation

An apparatus for Radio Frequency (RF) biasing for site isolated processing on a substrate, comprising:

• a plurality of RF biasing elements each configured to generate an RF bias localized to a site isolated region on the substrate;
• and
• a controller coupled to the plurality of RF biasing elements, the controller configured to:
• receive an indication of a selected site isolated region on the substrate at which to generate the RF bias;
• determine one of the plurality of RF biasing elements that corresponds to the selected site isolated region;
• and
• generate a control signal that causes activation of the one of the plurality of RF biasing elements.

An apparatus for combinatorial Radio Frequency (RF) biasing for site isolated processing on a substrate, comprising:

• at least one RF biasing element configured to generate an RF bias at a site isolated region on the substrate;
• and
• a controller coupled to the at least one RF biasing element, the controller configured to:
• receive an indication of a selected site isolated region on the substrate at which to generate the RF bias;
• determine a position that corresponds to the selected site isolated region;
• and
• generate a control signal based on the determined position, the control signal causing the at least one RF biasing element to generate the RF bias at the selected site isolated region.