Sputter gun shutter
AssigneeIntermolecular, Inc.
InventorsHong Sheng Yang, Hien Min Huu Le, Xuena Zhang
Life of this patent
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AssigneeIntermolecular, Inc.
InventorsHong Sheng Yang, Hien Min Huu Le, Xuena Zhang
Estimating the term…
In some embodiments of the present invention, a gun shutter is provided that comprises a gun shutter lip that aligns with a grounded shield lip to form a gap. The gap is operable to prevent contamination from other sputter guns present in the chamber. Additionally, the gun shutter is spaced apart from the face of the target so that a stable plasma may be ignited and maintained between the face of the target and the gun shutter. This allows the gun shutter to be used as a burn-in or conditioning shield and allows the elimination of other shields, thus lowering the size, complexity, and cost of the chamber.
A shutter for a sputter gun comprising:
A sputter gun comprising:
Dependencies are inferred from the claim text.