Method for producing cubic zirconia layers
AssigneeOerlikon Trading AG, Truebbach
InventorsJürgen Ramm, Beno Widrig
Life of this patent
Estimating the term…
Abstract
In order to produce zirconia-based layers on a deposition substrate, wherein reactive spark deposition using pulsed spark current and/or the application of a magnetic field that is perpendicular to the spark target are employed, a mixed target comprising elemental zircon and at least one stabilizer is used, or a zirconium target comprising elemental zirconium is used, wherein in addition to oxygen, nitrogen is used as the reactive gas. As an alternative, combined with the use of the mixed target, nitrogen can also be used as the reactive gas in addition to oxygen.
Claims28
A method for producing a zirconia-based layer on a deposition substrate by using reactive spark evaporation using pulsed spark current and/or applying a magnetic field that is perpendicular to the spark target, characterized in that a mixed target comprising elemental zirconium and at least one stabilizer is used.
A method for producing a zirconia-based layer on a deposition substrate, wherein reactive spark deposition using pulsed spark current and/or the application of a magnetic field that is perpendicular to the spark target are employed, characterized in that a zirconium target comprising elemental zirconium is used and wherein in addition to oxygen, nitrogen is used as a reactive gas.
An anode for a spark evaporation source comprising:
- an anode body with an anode surface,
- a heating coil along the anode surface, insulated electrically from the anode body,
- connections, insulated electrically from the anode body, for the heating coil.
Dependencies are inferred from the claim text.