Thermal diffusion chamber with cooling tubes

An apparatus comprising:

• a frame supporting a containment chamber;
• a sealed process chamber confined within the containment chamber;
• at least one fluid inlet box in fluidic communication with an exterior of the sealed process chamber, the fluid inlet box including at least a flow adjustment structure to control a fluid flow from a fluid source around the exterior of the sealed process chamber;
• an open loop heat exchange system in fluidic communication with an interior of the sealed process chamber;
• a controller communicating with the flow adjustment structure;
• and
• a control signal buss communicating with at least the flow adjustment structure, and the controller, the control signal buss sends a control signal to the flow adjustment structure in response to measured internal temperature value of an interior of said sealed process chamber, wherein the open loop heat exchange system includes cooling tubes that extend into the sealed process chamber.