Method for producing spectroscopic sensor

A method of manufacturing a spectroscopic sensor comprising an interference filter unit, having a cavity layer and first and second mirror layers opposing each other through the cavity layer, for selectively transmitting therethrough light in a predetermined wavelength range according to an incident position thereof;

• a light-transmitting substrate for transmitting therethrough the light incident on the interference filter unit;
• and a light detection substrate for detecting the light transmitted through the interference filter unit;
• the method comprising:
• a first step of forming the cavity layer by nanoimprinting on a handle substrate;
• a second step of forming the first mirror layer on the cavity layer after the first step;
• a third step of joining the light-transmitting substrate onto the first mirror layer after the second step;
• a fourth step of removing the handle substrate from the cavity layer after the third step;
• a fifth step of forming the second mirror layer on the cavity layer without the handle substrate after the fourth step;
• and
• a sixth step of joining the light detection substrate onto the second mirror layer after the fifth step.