Combinatorial Processing Tool
AssigneeIntermolecular, Inc.
InventorsKent Riley Child, Tony P. Chiang
Life of this patent
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Abstract
A combinatorial processing chamber is provided. The processing chamber includes a substrate support rotatable around a central axis. The substrate support has a plurality of subsections operable to be isolated from each other. The plurality of subsections has a rotatable support cell independently controllable from the substrate support. A vacuum source in fluid communication with a gap defined around a peripheral region of the substrate support is provided. The vacuum source is in fluid communication with a peripheral region of each rotatable support cell of the plurality of subsections.
Claims17
A processing chamber, comprising:
- a substrate support having a central axis,
- the central axis being perpendicular to a plane of the substrate support,
- the substrate support being rotatable around the central axis,
- the substrate support having a plurality of subsections operable to be physically isolated from each other,
- each of the plurality of subsections comprising a rotatable cell,
- each rotatable cell independently controllable from the substrate support;
- and
- a first gap defined around a peripheral region of the substrate support;
- a plurality of second gaps, each second gap defined around a peripheral region of one of the rotatable cells;
- a vacuum source in fluid communication with the first gap and each of the plurality of second gaps.
A processing chamber, comprising:
- a substrate support having a central axis,
- the central axis being perpendicular to a plane of the substrate support,
- the substrate support being rotatable around the central axis,
- the substrate support having a plurality of subsections operable to be physically isolated from each other;
- a plurality of coils,
- each one of the plurality of coils disposed under a corresponding one of the plurality of subsections of the substrate support,
- each of the plurality of coils independently operable to generate a magnetic field when supplied with a current;
- and
- a channel disposed around a periphery of each of the plurality of subsections,
- the channel operable to radiate heat away from an adjacent subsection.
Dependencies are inferred from the claim text.