Back to results
US 2013/0152856 A1Published application
Chemical bath deposition (cbd) apparatus
AssigneeIndustrial Technology Research Institute
InventorsWei-Tse Hsu, Tung-Po Hsieh, Song-Yeu Tsai
Life of this patent
Estimating the term…
Abstract
A chemical bath deposition (CBD) apparatus includes a first cap, a second cap, and a solution input/output device. The second cap is arranged corresponding to the first cap so as to form a deposition space. The solution input/output device is located in the first cap so as to feed a solution into/out of the deposition space. The position of the solution input/output device is fixed, or the solution input/output device is movable in the deposition space.
Claims23
A chemical bath deposition (CBD) apparatus, comprising:
- a first cap and a second cap, wherein the second cap is arranged corresponding to the first cap so as to form a deposition space;
- and
- a solution input/output device located in the first cap, wherein the position of the solution input/output device is fixed, or the solution input/output device is movable in the deposition space.
Dependencies are inferred from the claim text.