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US 2013/0152694 A1Published application
Sensor with vacuum cavity and method of fabrication
OwnerIlkka Urvas, Andrei Jurievich Pavlov +1inventors
InventorsIlkka Urvas, Andrei Jurievich Pavlov, Yelena Vasiljevna Pavlova
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Abstract
A MEMS pressure sensor device comprises a sensor element positioned on top of a carrier and a cavity. The sensor element hermetically seals the cavity. An electrode is coupled to the cavity that forms a pressure transducer together with the sensor element. The cavity is created by a density changing material.
Claims1
A MEMS pressure sensor device, comprising:
- a sensor element positioned on top of a carrier and
- a cavity, wherein the sensor element hermetically seals the cavity,
- an electrode coupled to the cavity that forms a pressure transducer together with the sensor element, wherein the cavity is created by a density changing material.
Dependencies are inferred from the claim text.