US 2013/0152693 A1Published application

Pressure sensor

AssigneePanasonic Corporation

InventorsKoumei Fujita, Kenji Fujii, Atsuo Takekawa

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Abstract

A pressure sensor includes a case, a vibrator, a detector, and a processor. The case includes a tubular section and a flat section. The tubular section has a hollow having an opening and is configured to be filled with a target fluid. The flat section closes the hollow. The flat section has a first surface facing the hollow, and a second surface opposite to the first surface. The vibrator is disposed on the second surface of the flat section of the case. The detector outputs a signal according to a vibration of the vibrator. The processor is operable to detect a frequency of the vibration of the vibrator based on the signal output from the detector, and to detect a pressure of the target fluid based on the detected frequency of the vibrator. This pressure sensor has a high sensitivity and excellent characteristics.

Claims6

Dependent claims

A pressure sensor configured to detect a pressure of a target fluid, the pressure sensor comprising:

a case including
a tubular section having a hollow having an opening, the hollow being configured to be filled with the target fluid;
a flat section closing the hollow, the flat section having a first surface and a second surface opposite to the first surface, the first surface of the flat section facing the hollow;
a first vibrator disposed on the second surface of the flat section of the case;
a first driver disposed at the first vibrator;
a first detector disposed at the first vibrator for outputting a signal according to a vibration of the first vibrator;
and
a processor operable to
input a drive signal to the first driver as to vibrate the first vibrator,
detect a frequency of the vibration of the first vibrator based on the signal output from the first detector, and
detect a pressure of the target fluid based on the detected frequency of the first vibrator.

8 more elements

Dependencies are inferred from the claim text.

Facts

Application: 13/818,279Filed 9 Nov 2011
Priority: JP 2010-25147210 Nov 2010
Published: 20 Jun 2013
Term ends: Not estimatedThe source records don’t support an estimate.

Classification4 codes

G01L 11/04
Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00: by…
G01L 9/0025
Of a piezoelectric element: with acoustic surface waves
G01L 23/10
Operated electrically: by pressure-sensitive members of the piezoelectric type
G01L
Measuring force, stress, torque, work, mechanical power, mechanical efficiency, or fluid pressure

Family

No related US applications are recorded in the indexed filing history.

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