System and Method of Reducing Noise in a MEMS Device

A MEMS device comprising:

• a plurality of variable capacitors for producing a plurality of respective variable capacitor signals;
• a frequency division multiplexer coupled with the plurality of variable capacitors and being configured to multiplex the plurality of variable capacitor signals to produce a plurality of multiplexed capacitance signals;
• a readout node electrically coupled with the multiplexer for receiving the plurality of frequency division multiplexed capacitance signals;
• and
• an output electrically coupled with the readout node, the output being configured to produce each of the capacitance signals in parallel.

A method of monitoring movement of microstructure in a MEMS device, the MEMS device having a first variable capacitor configured to produce a first capacitance signal relative to a first frame of reference, and a second variable capacitor configured to produce a second capacitance signal relative to a second frame of reference, the method comprising:

• modulating the first capacitance signal toward a readout node using a first frequency division multiplex signal;
• and
• modulating the second capacitance signal toward the same readout node using a second frequency division multiplex signal, the second capacitance signal being modulated at substantially the same time that the first capacitance signal is modulated toward the readout node,
• the first and second capacitance signals not interfering with each other.