US 2013/0152683 A1 · INERTIAL SENSOR

Abstract

Disclosed herein is an inertial sensor. The inertial sensor includes a sensing unit and a driving-mass-position initialization module. The sensing unit includes a driving mass, a flexible board unit which displaceably supports the driving mass, and a support which supports the flexible board unit to allow the driving mass to move in a suspended state. The flexible board unit has driving electrodes which move the driving mass, and sensing electrodes which sense the movement of the driving mass. The driving-mass-position initialization module includes a position initialization member which reciprocates to initialize the position of the driving mass, and a coil unit which surrounds the position initialization member. An initialization-member-receiving depression is formed in the driving mass. The shape of the initialization-member-receiving depression corresponds to that of the position initialization member.

Claims11

Dependent claims

An inertial sensor, comprising:

a sensing unit comprising:
a driving mass;
a flexible board unit displaceably supporting the driving mass, the flexible board unit having a driving electrode for moving the driving mass and a sensing electrode for sensing the movement of the driving mass;
and a support supporting the flexible board unit to allow the driving mass to move in a suspended state;
and
a driving-mass-position initialization module comprising:
a position initialization member reciprocating to initialize a position of the driving mass;
and a coil unit surrounding the position initialization member,
the driving mass having an initialization-member-receiving depression having a shape corresponding to the position initialization member.

6 more elements

Dependencies are inferred from the claim text.

Inertial sensor

Life of this patent

Inertial sensor

Life of this patent

Abstract

Claims11