C-core actuator for moving a stage
AssigneeNikon Corporation
InventorsMichael Binnard, Scott Coakley, Yoichi Arai, Rick K. Ingram
Life of this patent
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Abstract
A mover assembly (46) for moving a stage (14) includes an actuator (30) that is coupled to the stage (14). The actuator (30) includes (i) a C-Core (52) having a generally “C” shape and including a first transverse leg (260), a second transverse leg (262) that is spaced apart from the first transverse leg (260), and a connector region (264) that connects the transverse legs (260), (262); (ii) a coil (270) that is wrapped around the first transverse leg (260); and (ii) an I core (250) that is spaced apart a gap (254) from the C-Core (252).
Claims21
A mover assembly for moving a stage, the mover assembly comprising:
- a first actuator that is coupled to the stage, the first actuator including (i) a C-Core that is somewhat “C” shaped and includes a first transverse leg, a second transverse leg that is spaced apart from the first transverse leg, and a connector region that connects the transverse legs;
- (ii) a coil that is wrapped around the first transverse leg;
- and (iii) an I core that is spaced apart a gap from the C-Core.
A stage assembly for moving a device, the stage assembly comprising:
- a stage that retains the device, the stage including;
- a mover assembly that moves the stage, the mover assembly comprising:
- a first actuator that is coupled to the stage, the first actuator including (i) a C-Core that is somewhat “C” shaped and includes a first transverse leg, a second transverse leg that is spaced apart from the first transverse leg, and a connector region that connects the transverse legs;
- and (ii) a coil that is wrapped around the first transverse leg;
- a second actuator that is coupled to the stage, the second actuator including (i) a C-Core that is somewhat “C” shaped and includes a first transverse leg, a second transverse leg that is spaced apart from the first transverse leg, and a connector region that connects the transverse legs;
- (ii) a coil that is wrapped around the first transverse leg;
- an I-Core assembly that is spaced apart a first gap from the C-Core of the first actuator and a second gap from the C-Core of the second actuator;
- and
- a control system that directs current to the coil of the first actuator to attract the C-Core of the first actuator to the I-Core assembly, and directs current to the coil of the second actuator to attract the C-Core of the second actuator to the I-Core assembly.
A method for positioning a first stage relative to a second stage, the method comprising the steps of:
- providing a first actuator that includes (i) a C-Core that is somewhat “C” shaped and includes a first transverse leg, a second transverse leg that is spaced apart from the first transverse leg, and a connector region that connects the transverse legs;
- (ii) a coil that is wrapped around the first transverse leg;
- and (iii) an I-Core assembly that is spaced apart a gap from the C-Core;
- coupling the C-Core of the first actuator to one of the stages;
- coupling the I-Core assembly to the other of the stages;
- and
- directing current to the coil of the first actuator with a control system to attract the C-Core to the I-Core assembly.
Dependencies are inferred from the claim text.