Back to results
US 2013/0095574 A1Published application
Method for producing microparticles
AssigneeBiocartis NV
InventorsNicolas DEMIERRE, Stephan GAMPER
Life of this patent
Estimating the term…
Abstract
Silicon microcarriers suitable for fluorescent assays as a well as a method of producing such microcarriers are provided. The method includes the steps of providing a SOI wafer having a bottom layer of monocristalline silicone, an insulator layer and a bottom layer of monocristalline silicon, delineating microparticles, etching away the insulator layer and then depositing an oxide layer on the wafer still holding the microparticles before finally lifting-off the microparticles.
Claims19
A method for producing microparticles suitable as support for fluorescent assays, comprising the steps of:
- (a) providing a wafer having a sandwich structure comprising a bottom layer, an insulator layer and a top layer;
- (b) etching the top layer to delineate microparticles;
- (c) etching away the insulator layer;
- (d) depositing a layer on the wafer still holding the microparticles avoiding any forces that are capable of detaching the microparticles;
- and
- (e) lifting-off the microparticles from the wafer, wherein step (d) occurs after step (c) and before step (e).
3 more elements
Dependencies are inferred from the claim text.