Back to results
US 2013/0094534 A1Published application
Laser crystallization apparatus and laser crystallization method using the same
AssigneeSamsung Display Co., Ltd.
InventorHiroshi Okumura
Life of this patent
Estimating the term…
Abstract
A laser crystallization device is provided, which includes a vibration device vibrating a laser beam along its long axis, wherein a vibration frequency at which the laser beam vibrates is satisfied by Equation 1 below. F<(P*f)/ (2*W) Equation 1 where F is the mirror vibration frequency, W is the laser beam width, P is the laser scan pitch, and f is the laser pulse frequency.
Claims8
A laser crystallization device comprising
- a vibration device vibrating a laser beam along a long axis of the laser beam,
- wherein a vibration frequency at which the laser beam vibrates is satisfied by Equation 1 below:
- F<(P*f)/(2*W) Equation 1
- wherein F is a mirror vibration frequency, W is a laser beam width, P is a laser scan pitch, f is a laser pulse frequency.
1 more element
A laser crystallization device comprising:
- a vibration device vibrating a laser beam along a long axis of the laser beam,
- wherein a vibration frequency at which the laser beam vibrates is satisfied by Equation 2 below:
- F<(P*f)/Ts Equation 2
- wherein F is a mirror vibration frequency, P is a laser scan pitch, f is a laser pulse frequency, Ts is a spacing between thin film transistors along a laser beam scan direction.
1 more element
A laser crystallization device comprising
- a vibration device vibrating a laser beam along a long axis of a laser beam ,
- wherein a vibration frequency at which the laser beam vibrates is satisfied by Equation 6 below:
- F<(3*Tm*P*f)/(2*Ts*A) Equation 6
- wherein F is mirror vibration frequency, P is laser scan pitch, f is laser pulse frequency, Ts is a spacing between thin film transistors along a laser beam scan direction, A is mirror vibration distance, Tm:
- a spacing between thin film transistors in a mirror vibration direction.
2 more elements
Dependencies are inferred from the claim text.