Testing device for testing plates for electronic circuits and relative method
AssigneeApplied Materials Italia S.R.L.
InventorsDiego Tonini, Alessandro Voltan, Marco Galiazzo, Marco Martire
Life of this patent
Estimating the term…
Abstract
A testing device (100) is disclosed for testing wafers (11), comprising a measuring head (10) provided with three functional blocks (12, 13, 14), each able to move independently from the others, to carry out different resistive measurements on a cell or wafer (11). Each of the functional blocks (12, 13, 14) supports respective measuring probes (15), suitable to be placed into contact with metallization lines or fingers (16), made on the wafers (11).
Claims19
A testing device for testing plates, comprising:
- a measuring head having first, second and third functional blocks, wherein each functional block is able to move independently from the others and is suitable for carrying out different resistive measurements on a plate comprising a substrate having metallization lines or fingers;
- and
- wherein each of the functional blocks supports a plurality of measuring probes, such that the first functional block comprises probes positioned and configured to measure a surface resistance of the substrate, the second functional block comprises probes positioned and configured to measure a total resistance between two opposite metallization lines or fingers, and the third functional block comprises probes positioned and configured to measure a contact end resistance between three adjacent metallization lines or fingers.
A method for testing plates, comprising:
- insulating a plurality of metallization lines or fingers present on one or more plates;
- creating a grid of elementary cells by mapping a surface of the one or more plates;
- and
- activating a measuring head having first, second and third functional blocks such that each functional block acts in sequence to conduct a sequence of measuring steps comprising:
- measuring a surface resistance of the surface of the one or more plates with the first functional block;
- measuring a total resistance of a portion of the one or more plates with the second functional block;
- and
- measuring a contact end resistance of a portion of the one or more plates using the third functional block.
A testing device for testing solar cells, comprising:
- a control unit;
- a source of current in electronic communication with the control unit;
- a voltmeter in electronic communication with the control unit;
- and
- a measuring head in electronic communication with the control unit, the measuring head having a first functional block, a second functional block and a third functional block, wherein each functional block is suitable for measuring one or more properties of a solar cell, such that the first functional block is suitable for measuring sheet resistance of a unit area of the solar cell, the second functional block is suitable for measuring total resistance between two insulated fingers formed on the solar cell, and the third functional block is suitable for measuring contact end resistance of a portion of the solar cell using three adjacent fingers.
Dependencies are inferred from the claim text.