Semiconductor device and method for fabricating the same
AssigneeDongbu HiTek Co., Ltd.
InventorCheol Ho CHO
Life of this patent
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Abstract
A semiconductor device includes a laterally double diffused metal oxide semiconductor (LDMOS) transistor formed on a partial region of a epitaxial layer of a first conductive type, a bipolar transistor formed on another partial region of the epitaxial layer of the first conductive type, and a guard ring formed between the partial region and the another partial region. The guard ring serves to restrain electrons generated by a forward bias operation of the LDMOS transistor from being introduced into the bipolar transistor.
Claims14
A semiconductor device, comprising:
- a laterally double diffused metal oxide semiconductor (LDMOS) transistor formed on a first portion of an epitaxial layer, wherein the epitaxial layer is a first conductive type;
- a bipolar transistor formed on a second portion of the epitaxial layer;
- and
- a guard ring formed between the first portion of the epitaxial layer and the second portion of the epitaxial layer, wherein the guard ring substantially prevents electrons generated by a forward bias operation of the LDMOS transistor from moving into the bipolar transistor.
A method of fabricating a semiconductor device having a laterally double diffused metal oxide semiconductor (LDMOS) transistor and a bipolar transistor, the method comprising:
- forming an epitaxial layer over a semiconductor substrate, wherein the epitaxial layer is a first conductive type;
- forming a buried layer by implanting impurity ions into a first portion of the epitaxial layer in which the bipolar transistor is to be formed, wherein the buried layer is a second conductive type, wherein the second conductive type has an opposite polarity to the first conductive type;
- forming a guard ring connected to an upper portion of one side of the buried layer;
- forming a first extension region by implanting impurity ions of the first conductive type into a portion of the epitaxial layer, wherein the first extension region partially overlaps the buried layer, wherein the first extension region is in contact with the buried layer;
- forming a second extension region of the second conductive type within the first extension region through a second conductive type impurity ion implantation process;
- implanting impurity ions of the first conductive type into both a portion of the second extension region and a region between the guard ring and the first extension region to form a first conductive well junction and a well, wherein the first conductive well junction and the well are of the first conductive type;
- implanting impurity ions of the second conductive type to form an emitter region within the first conductive well junction and to form a collector region within the second extension region, wherein the collector region is isolated from the emitter region by a preset distance;
- and
- implanting impurity ions of the first conductive type into the well to form a base region within the well.
Dependencies are inferred from the claim text.