Probe Pad Design for 3DIC Package Yield Analysis
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsTzu-Yu Wang, Chen-Hua Yu, Shin-Puu Jeng, Shang-Yun Hou, Hsien-Pin Hu, Wei-Cheng Wu, Li-Han Hsu, Meng-Han Lee
Life of this patent
Estimating the term…