Photoresist coater carrying system and photoresist coater having the same
AssigneeShenzhen China Star Optoelectronics Technology Co., Ltd.
InventorChih-hao Chang
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AssigneeShenzhen China Star Optoelectronics Technology Co., Ltd.
InventorChih-hao Chang
Estimating the term…
The present invention relates to a photoresist coater, which includes a receiving space consisting a top slab and a bottom slab, supporting pins and a carrying tray disposed in the receiving space. The supporting pins are coupled to the carrying tray. The photoresist coater further includes an adjustment mechanism disposed in the receiving space for automatically adjusting a height of the carrying tray. The adjustment mechanism is coupled to the carrying tray. The present invention further relates to a photoresist coater carrying system. The carrying system and the corresponding photoresist coater have a simpler way of operation and higher adjustment accuracy.
A photoresist coater carrying system, characterized in that, comprising a carrying tray and an adjustment mechanism for automatically adjusting a height of the carrying tray, the adjustment mechanism is coupled to the carrying tray;
A photoresist coater carrying system, characterized in that, comprising a carrying tray and an adjustment mechanism for automatically adjusting a height of the carrying tray, the adjustment mechanism being coupled to the carrying tray.
A photoresist coater, comprising:
Dependencies are inferred from the claim text.