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US 2013/0091876 A1Published application
Temperature control system and method for a chamber or platform and temperature-controlled chamber or platform including the temperature control system
AssigneeTemptronic Corporation
InventorChuan WENG
Life of this patent
Estimating the term…
Abstract
A temperature control system and method include a source of a temperature control medium that is to be introduced into a space. A fluid line conveys the temperature control medium from the source to the space, a first end of the fluid line being disposed in the space. An orifice assembly has an orifice through which the cooling medium flows toward the space. A size of the orifice is adjustable such that a rate of flow of the cooling medium entering the space is controllable.
Claims26
A temperature control system, comprising:
- a source of a temperature control medium, the temperature control medium to be introduced into a space;
- a fluid line for conveying the temperature control medium from the source to the space, a first end of the fluid line being disposed in the space;
- and
- an orifice assembly having an orifice through which the cooling medium flows toward the space, a size of the orifice being adjustable such that a rate of flow of the cooling medium entering the space is controllable.
1 more element
A temperature control system, comprising:
- a space;
- a source of a temperature control medium, the temperature control medium to be introduced into the space;
- a fluid line for conveying the temperature control medium from the source to the space, a first end of the fluid line being disposed in the space;
- and
- an orifice assembly having an orifice through which the cooling medium flows toward the space, a size of the orifice being adjustable such that a rate of flow of the cooling medium entering the space is controllable.
2 more elements
A method of controlling temperature in a space, comprising:
- conveying a temperature control medium through a fluid line from a source of the temperature control medium to a first end of the fluid line, an orifice assembly having an orifice through which the cooling medium flows to enter the space;
- and
- adjusting a size of the orifice such that a rate of flow of the cooling medium entering the space is controllable.
Dependencies are inferred from the claim text.