Exposure apparatus having blind and method of driving
AssigneeSamsung Display Co., Ltd.
InventorsChang-Hoon KIM, Hong-Suk YOO
Life of this patent
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Abstract
An exposure apparatus includes a light source, a mask, a blind, and a blind driver. The light source emits light in a light emitting cycle. The mask is disposed over a substrate and includes an exposure window. A pattern is formed in the exposure window. The blind is disposed over the exposure window. The blind moves in a first direction to block a non-exposed area in the substrate. The blind is returned to pass through the exposure window area in a second direction opposite to the first direction. The blind includes a plurality of blocking plates. The blocking plates include a blocking portion and an opening portion. The blind driver drives the blind.
Claims25
An exposure apparatus, comprising:
- a light source to emit light in a light emitting cycle;
- a mask disposed over a substrate comprising an exposure window, a pattern being formed therein;
- a blind comprising a plurality of blocking plates, each blocking plate comprising a blocking portion and an opening portion, the blind disposed over the exposure window to move in a first direction to block a non-exposed area of the substrate and to pass through the exposure window area in a second direction opposite to the first direction;
- and
- a blind driver to drive the blind.
A method of driving an exposure apparatus, the method comprising:
- emitting light from a light source in a light emitting cycle;
- moving a plurality of blocking plates in a first direction to block light from reaching a non-exposed area of a substrate, wherein the blocking plates are disposed over the substrate and an exposure window of a mask, and the blocking plates comprise a blocking portion and an opening portion;
- and
- moving the blocking plates to pass through the exposure window area of the mask in a second direction opposite to the first direction.
Dependencies are inferred from the claim text.