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AssigneeShenzhen China Star Optoelectronics Technology Co., Ltd.
InventorPeng Chen
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Disclosed is a vacuum pump exhaust pipe of a chemical vapor deposition apparatus, wherein two ports of the vacuum pump exhaust pipe are respectively connected to a vacuum pump outlet and a scrubber, and anti-sticking inner pipes are installed inside the exhaust pipe and closely contacted with inner walls of the exhaust pipe. The present invention also relates to a vacuum pump of the chemical vapor deposition apparatus. Blockage hardly occurs in the vacuum pump exhaust pipe of the chemical vapor deposition apparatus and the relevant vacuum pump according to the present invention to solve problems of the easily found blockage in the exhaust pipe, wasting the manpower and the time for clearing the exhaust pipe and the effect to the uptime of the chemical vapor deposition apparatus in the prior arts.
A vacuum pump exhaust pipe of a chemical vapor deposition apparatus, wherein two ports of the vacuum pump exhaust pipe are respectively connected to a vacuum pump outlet and a scrubber, characterized in that anti-sticking inner pipes are installed inside the exhaust pipe and closely contacted with inner walls of the exhaust pipe, and a material of the anti-sticking inner pipes is Polytetrafluoroethene, and the anti-sticking inner pipes are installed at a joint of the vacuum pump outlet and the exhaust pipe and at a joint of the scrubber and the exhaust pipe, and outer surfaces of portions of the exhaust pipe which are not installed with the anti-sticking inner pipes are attached with heating tapes.
A vacuum pump exhaust pipe of a chemical vapor deposition apparatus, wherein two ports of the vacuum pump exhaust pipe are respectively connected to a vacuum pump outlet and a scrubber, characterized in that anti-sticking inner pipes are installed inside the exhaust pipe and closely contacted with inner walls of the exhaust pipe.
A vacuum pump of a chemical vapor deposition apparatus, wherein two ports of the vacuum pump are respectively connected to an outlet of the chemical vapor deposition apparatus and a scrubber, and the vacuum pump comprises a exhaust pipe connected to the scrubber, characterized in that anti-sticking inner pipes are installed inside the exhaust pipe and closely contacted with inner walls of the exhaust pipe, and a material of the anti-sticking inner pipes is Polytetrafluoroethene.
Dependencies are inferred from the claim text.