Nonvolatile semiconductor memory device

Abstract

According to one embodiment, a nonvolatile semiconductor memory device includes: a stacked body including a plurality of electrode layers and a plurality of insulating layers, which are alternately stacked, and diffusion suppressing layers each provided between each of the plurality of electrode layers and each of the plurality of insulating layers; and a memory film provided on a side wall of a hole penetrating the stacked body in a stacking direction. Each of the plurality of electrode layers is a first semiconductor layer containing a first impurity element. The diffusion suppressing layer is a second semiconductor layer containing a second impurity element which is different from the first impurity element. The diffusion suppressing layer is a film having an effect of suppressing diffusion of the first impurity element.

Dependencies are inferred from the claim text.