Microwave processing apparatus and method for processing object to be processed
OwnerMitsutoshi ASHIDAinventor
Life of this patent
Estimating the term…
Abstract
A microwave processing apparatus includes a processing chamber which accommodates an object to be processed, and a microwave introducing unit which has at least one microwave source to generate a microwave used to process the object and introduces the microwave into the processing chamber. The microwave processing apparatus further includes a control unit which controls the microwave introducing unit. Furthermore, the control unit changes a frequency of the microwave during a state of processing the object.
Claims14
A microwave processing apparatus comprising:
- a processing chamber which accommodates an object to be processed;
- a microwave introducing unit which has at least one microwave source to generate a microwave used to process the object and introduces the microwave into the processing chamber;
- and
- a control unit which controls the microwave introducing unit,
- wherein the control unit changes a frequency of the microwave during a state of processing the object.
A method for processing an object to be processed by using a microwave processing apparatus including a processing chamber which accommodates the object, and a microwave introducing unit which has at least one microwave source to generate a microwave used to process the object and introduces the microwave into the processing chamber, the method comprising:
- changing a frequency of the microwave during a state of processing the object.
Dependencies are inferred from the claim text.