Laser crystallization of thin films on various substrates at low temperatures

A method of inducing crystallization in thin films with a laser system, the method comprising:

• obtaining a thin film comprising a substrate and a target layer deposited on the substrate, wherein the target layer comprises nano-scale particles;
• determining the heat conduction between the target layer and the substrate of the thin film based on thermal input from the laser system to identify operating parameters for the laser system that cause crystallization of the nano-scale particles of the target layer in an environment at near room temperature with the substrate remaining at a temperature below the temperature of the target layer;
• transmitting a laser beam of the laser system along an optical path to impinge the target layer of the thin film;
• and then
• pulsing the laser beam to create a localized rapid heating and cooling of the target layer, wherein the laser system is operated at the operating parameters identified in the determining step to crystallize the nano-scale particles of the target layer and maintain the substrate at a temperature below the temperature of the target layer.