Member separation apparatus and member separation method

A member separation method comprising:

• generating laser light including a component of a first wavelength and a component of a second wavelength different from the first wavelength;
• and
• irradiating a workpiece including a first member and a second member with the laser light to separate the first member from the second member, the first member being transmissive to the laser light, and the second member being in contact with the first member and having an absorptance, the absorptance for light of the first wavelength being higher than the absorptance for light of the second wavelength.

A member separation method comprising:

• generating laser light including a component of a first wavelength;
• and
• irradiating a workpiece including a first member and a second member with the laser light through an optical film to separate the first member from the second member, the first member being transmissive to light of the first wavelength, the second member being in contact with the first member and having a higher absorptance for the light of the first wavelength than the first member, and the optical film being provided on an opposite surface of the first member from the second member and suppressing reflection of the laser light in the first member.