Surface protective film, gas contact member, gas processing apparatus, and mechanical pump
OwnerTadahiro Ohmi, Toshiya Umeki +1inventors
InventorsTadahiro Ohmi, Toshiya Umeki, Isao Akutsu
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Abstract
An object of this invention is to provide a surface protective film which is capable of suppressing the entry of a corrosive gas as compared with conventional surface protective films. A surface protective film according to this invention is a film which contains yttria (Y2O3) as a main component and also contains cerium. Since the surface protective film contains cerium, defects such as micropores in the film are reduced, thereby enabling suppression of the entry of a corrosive gas.
Claims15
A surface protective film being composed mainly of yttria (Y2O3) and containing cerium.
A mechanical pump having, on a surface of a gas contact portion which is a portion to be brought into contact with a gas to be discharged, a surface protective film which is a yttria film added with cerium oxide.
Dependencies are inferred from the claim text.