Temperature-measuring substrate and heat treatment apparatus
AssigneeTokyo Electron Limited
InventorKenichi YAMAGA
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Abstract
A temperature-measuring substrate (50) for use in a heat treatment apparatus (2) for performing heat treatment of a substrate W to be processed, includes: a substrate body (62); an oscillator (64) including a piezoelectric element (68) and provided in the substrate body; and an antenna portion (66) connected to the oscillator and provided beside or around the periphery of the substrate body. The temperature-measuring substrate can reduce the attenuation of radio waves emitted by the oscillator.
Claims22
A temperature-measuring substrate for use in a heat treatment apparatus for performing heat treatment to a process-target substrate, comprising:
- a substrate body;
- an oscillator including a piezoelectric element and provided in the substrate body;
- and
- an antenna portion connected to the oscillator and provided at a peripheral portion of substrate body.
Dependencies are inferred from the claim text.