Pattern forming device, pattern forming method, and device manufacturing method
AssigneeNikon Corporation
InventorsTohru KIUCHI, Hideo MIZUTANI
Life of this patent
Estimating the term…
Abstract
Presented are methods for forming a predetermined pattern in a predetermined area of an elongated sheet material. The methods include applying a two-dimensional tension to a portion including the predetermined area of the sheet material, and allowing a flat reference surface to adsorb a rear surface portion corresponding to the predetermined area of the sheet material applied with the two-dimensional tension. The methods then illuminate an energy beam corresponding to the pattern to the predetermined area of the sheet material adsorbed to the reference surface.
Claims15
1-12. (canceled)
A pattern forming method of forming a predetermined pattern in a predetermined area of an elongated sheet material, the pattern forming method comprising:
- applying a two-dimensional tension to a portion including the predetermined area of the sheet material;
- allowing a flat reference surface to adsorb a rear surface portion corresponding to the predetermined area of the sheet material applied with the two-dimensional tension;
- and
- illuminating an energy beam corresponding to the pattern to the predetermined area of the sheet material adsorbed to the reference surface.
A pattern forming method of forming a predetermined pattern in a predetermined area of a surface of an elongated sheet material, the pattern forming method comprising:
- restraining at least two positions of the sheet material in the longitudinal direction so as to apply a first tension to the predetermined area in the longitudinal direction;
- restraining both sides of the sheet material in the width direction intersecting the longitudinal direction of the sheet material so as to apply a second tension to the predetermined area in the width direction;
- allowing a rear surface portion corresponding to the predetermined area of the sheet material to change in accordance with a flat reference surface in the state where the first and second tensions are applied to the predetermined area;
- and
- illuminating an energy beam corresponding to the pattern to the predetermined area of the flattened sheet material.
26-36. (canceled)
Dependencies are inferred from the claim text.