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US 2012/0269372 A1Published application
Micromachined horn
AssigneeAvago Technologies Wireless IP (Singapore) Pte. Ltd.
InventorsDavid MARTIN, Joel PHILLIBER, John CHOY
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Abstract
An acoustic device includes a transducer formed on a first surface of a substrate and an acoustic horn formed in the substrate by a dry-etching process through an opposing second surface of the substrate. The acoustic horn is positioned to amplify sound waves from the transducer and defines a non-linear cross-sectional profile.
Claims20
An acoustic device, comprising:
- a transducer formed on a first surface of a substrate;
- and
- an acoustic horn formed in the substrate by a dry-etching process through an opposing second surface of the substrate, and positioned to amplify sound waves from the transducer, the acoustic horn defining a non-linear cross-sectional profile.
An acoustic device, comprising:
- a semiconductor substrate;
- a piezoelectric ultrasonic transducer formed on a front surface of the substrate;
- and
- an acoustic horn formed through a back surface of the substrate by a deep reactive ion etching (DRIE) dry-etching process, a throat of the acoustic horn being positioned adjacent to the transducer,
- wherein a cross-sectional profile of the acoustic horn comprises substantially exponential sidewalls.
2 more elements
An acoustic device, comprising:
- a semiconductor substrate;
- a piezoelectric ultrasonic transducer formed on a front surface of the substrate;
- and
- an acoustic horn formed through a back surface of the substrate by a deep reactive ion etching (DRIE) dry-etching process, a throat of the acoustic horn being positioned adjacent to the transducer,
- wherein a cross-sectional profile of the acoustic horn comprises stepped sidewalls with at least two distinct angles.
2 more elements
Dependencies are inferred from the claim text.