X-ray source with an immersion lens
AssigneeCarl Zeiss X-ray Microscopy, Inc.
InventorsDavid L. Adler, Wenbing Yun, Thomas Anthony Case
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Abstract
An x-ray source is described. During operation of the x-ray source, an electron source emits a beam of electrons. This beam of electrons is focused to a spot on a target by a magnetic focusing lens. In particular, the magnetic focusing lens includes an immersion lens in which a peak in a magnitude of an associated magnetic field occurs proximate to a plane of the target. Moreover, in response to receiving the beam of focused electrons, the target provides a transmission source of x-rays.
Claims20
An x-ray source, comprising:
- an electron source configured to emit a beam of electrons;
- a magnetic focusing lens configured to focus the beam of electrons to a spot, having a spot size, on a target, wherein the magnetic focusing lens includes an immersion lens in which a peak in a magnitude of a magnetic field associated with the magnetic focusing lens occurs proximate to a plane of the target;
- and
- the target configured to provide a transmission source of x-rays in response to receiving the beam of focused electrons.
A system, comprising an x-ray source, wherein the x-ray source includes:
- an electron source configured to emit a beam of electrons;
- a magnetic focusing lens configured to focus the beam of electrons to a spot, having a spot size, on a target;
- and
- the target configured to provide a transmission source of x-rays in response to receiving the beam of focused electrons, wherein the magnetic focusing lens includes an immersion lens in which a peak in a magnitude of a magnetic field associated with the magnetic focusing lens occurs proximate to a plane of the target.
A method for providing a transmission source of x-rays, the method comprising:
- emitting a beam of electrons from an electron source;
- focusing, using a magnetic focusing lens, the beam of electrons to a spot, having a spot size, on a target, wherein the magnetic focusing lens includes an immersion lens in which a peak in a magnitude of a magnetic field associated with the magnetic focusing lens occurs proximate to a plane of the target;
- and
- in response to receiving the beam of focused electrons at the target, providing the transmission source of x-rays.
Dependencies are inferred from the claim text.