Back to results
US 2012/0268440 A1Published application
Widening resonator bandwidth using mechanical loading
AssigneeQUALCOMM MEMS Technologies, Inc.
InventorsChanghan Hobie Yun, Chengjie Zuo, Chi Shun Lo, Sanghoon Joo, Jonghae Kim
Life of this patent
Estimating the term…
Abstract
This disclosure provides systems, apparatus and techniques by which electromechanical resonators are implemented. In one aspect, by mechanically loading the resonator body in specific ways, multiple resonance modes are created within the resonator body resulting in wider bandwidths.
Claims20
An electromechanical resonator, comprising:
- a resonator cavity defined by a substrate, side walls, and a sealing element;
- a resonator body disposed within the resonator cavity substantially parallel to the substrate and the sealing element, the resonator body having a plurality of electrodes disposed thereon;
- and
- one or more mechanical loading elements mechanically connecting the resonator body to either or both of the substrate or the sealing element, wherein the one or more mechanical loading elements mechanically loads the resonator body to create a plurality of in-plane resonance modes within the resonator body.
1 more element
An electromechanical resonator, comprising:
- a resonator cavity defined by a substrate, side walls, and a sealing element;
- a resonator body disposed within the resonator cavity substantially parallel to the substrate and the sealing element, the resonator body having an input electrode and an output electrode disposed thereon;
- and
- a mechanical loading element mechanically connecting the resonator body to the substrate, wherein the mechanical loading element includes an elongated member disposed along a longitudinal axis of the resonator body and substantially along a center line of a surface of the resonator body, and wherein the mechanical loading element mechanically loads the resonator body to create two in-plane resonance modes within the resonator body.
1 more element
An electromechanical resonator, comprising:
- a resonator cavity defined by a substrate, side walls, and a transparent sealing element;
- a resonator body disposed within the resonator cavity substantially parallel to the substrate and the sealing element, the resonator body having an input electrode and an output electrode disposed thereon;
- and
- a transparent mechanical loading element mechanically connecting the resonator body to the sealing element, wherein the mechanical loading element includes an elongated member disposed along a longitudinal axis of the resonator body and substantially along a center line of a surface of the resonator body, and wherein the mechanical loading element mechanically loads the resonator body to create two in-plane resonance modes within the resonator body.
1 more element
An apparatus, comprising:
- a display;
- a network interface including one or more electromechanical resonators, each resonator comprising:
- a resonator cavity defined by a substrate, side walls, and a sealing element
- a resonator body disposed within the resonator cavity substantially parallel to the substrate and the sealing element, the resonator body having a plurality of electrodes disposed thereon;
- and
- one or more mechanical loading elements mechanically connecting the resonator body to either or both of the substrate or the sealing element, wherein the one or more mechanical loading elements mechanically loads the resonator body to create a plurality of in-plane resonance modes within the resonator body;
- a processor that is configured to communicate with the display and the network interface, the processor being configured to process image data;
- and
- a memory device that is configured to communicate with the processor.
6 more elements
Dependencies are inferred from the claim text.