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US 2012/0268229 A1Published application
Compact Vertical Inductors Extending in Vertical Planes
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsHsiao-Tsung Yen, Huan-Neng Chen, Yu-Ling Lin, Chin-Wei Kuo, Mei-Show Chen, Ho-Hsiang Chen, Min-Chie Jeng
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Abstract
A device includes a substrate, and a vertical inductor over the substrate. The vertical inductor includes a plurality of parts formed of metal, wherein each of the parts extends in one of a plurality of planes perpendicular to a major surface of the substrate. Metal lines interconnect neighboring ones of the plurality of parts of the vertical inductor.
Claims18
A device comprising:
- a substrate;
- and
- a vertical inductor over the substrate and comprising:
- a plurality of parts formed of metal, wherein each of the parts extends in one of a plurality of planes perpendicular to a major surface of the substrate;
- and
- metal lines interconnecting neighboring ones of the plurality of parts.
3 more elements
A device comprising:
- a substrate;
- a plurality of metal layers over the substrate;
- and
- a vertical inductor comprising:
- a plurality of parts formed of metal;
- a spiral metal feature in each of the plurality of parts, wherein the spiral metal feature comprises a plurality of metal lines in the plurality of metal layers and a plurality of vias interconnecting the plurality of metal lines, and wherein the spiral metal feature extends along a vertical plane perpendicular to a major surface of the substrate;
- and
- metal lines interconnecting the plurality of parts.
5 more elements
A device comprising:
- a substrate;
- and
- a first vertical inductor over the substrate and comprising a first coil formed of metal, with a first axis of the first coil extending in a first direction parallel to a major surface of the substrate.
Dependencies are inferred from the claim text.