Capacitor structure with metal bilayer and method for using the same
AssigneeNanya Technology Corporation
InventorsVassil Antonov, Vishwanath Bhat, Chris Carlson
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Abstract
A method for using a metal bilayer is disclosed. First, a bottom electrode is provided. Second, a dielectric layer which is disposed on and is in direct contact with the lower electrode is provided. Then, a metal bilayer which serves as a top electrode in a capacitor is provided. The metal bilayer is disposed on and is in direct contact with the dielectric layer. The metal bilayer consists of a noble metal in direct contact with the dielectric layer and a metal nitride in direct contact with the noble metal.
Claims20
A capacitor structure, comprising:
- an upper electrode substantially consisting of a noble metal;
- a cap layer substantially consisting of a metal nitride and directly covering said upper electrode;
- a lower electrode comprising a conductive material;
- and
- a dielectric layer disposed between and in direct contact with said upper electrode and said lower electrode.
A method for using a metal bilayer, comprising:
- providing a bottom electrode;
- providing a dielectric layer disposed on and in direct contact with said lower electrode;
- providing a metal bilayer which serves as a top electrode in a capacitor, said metal bilayer disposed on and in direct contact with said dielectric layer, wherein said metal bilayer consists of a noble metal indirect contact with said dielectric layer and a metal nitride in direct contact with said noble metal.
Dependencies are inferred from the claim text.