Semiconductor device having fuse elements and guard ring surrounding the fuse elements
AssigneeElpida Memory, Inc.
InventorsShuichi Nagase, Hisayuki Nagamine
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AssigneeElpida Memory, Inc.
InventorsShuichi Nagase, Hisayuki Nagamine
Estimating the term…
The semiconductor memory device has a fuse area in which fuse elements for registering addresses of defective memory cells are arranged. A guard ring is formed around the fuse area and is covered by a passivation film. The passivation film above the fuse area has an opening. The guard ring has a first ring in a first layer, a second ring in a second layer and a third ring in a third layer. These rings are connected by a first connecting ring and a second connecting ring. The first ring is positioned at an inward part of the second ring to provide an area unoccupied by the first ring beneath the second ring.
A semiconductor device comprising:
A semiconductor device comprising:
The semiconductor device as claimed in claim further comprising a protective film covering the first to third ring elements and the first and second connecting ring elements,
A semiconductor device comprising:
Dependencies are inferred from the claim text.