Semiconductor wafer, semiconductor device, and method for producing semiconductor wafer
AssigneeSumitomo Chemical Company, Limited
InventorsSadanori YAMANAKA, Tomoyuki TAKADA, Masahiko HATA
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AssigneeSumitomo Chemical Company, Limited
InventorsSadanori YAMANAKA, Tomoyuki TAKADA, Masahiko HATA
Estimating the term…
To improve the flatness of the surface and improve the reliability of a semiconductor device when expitaxially growing semiconductor crystal layers of different types on a single silicon wafer, provided is a semiconductor wafer which includes: a base wafer having a silicon crystal in the surface thereof, the silicon crystal having a first dent and a second dent; a first Group IVB semiconductor crystal located in the first dent and exposed; a second Group IVB semiconductor crystal located in the second dent; and a Group III-V compound semiconductor crystal located above the second Group IVB semiconductor crystal in the second dent and exposed.
A semiconductor wafer, comprising:
A semiconductor wafer comprising:
A method for producing a semiconductor wafer, the method comprising;
A method for producing a semiconductor wafer, the method comprising:
Dependencies are inferred from the claim text.