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US 2012/0267627 A1Published application
Polycrystalline texturing composition and method
AssigneeRohm and Haas Electronic Materials LLC
InventorsRobert K. BARR, Corey OCONNOR
Life of this patent
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Abstract
An aqueous acidic composition which includes alkaline compounds, fluoride ions and oxidizing agents is provided for texturing polycrystalline semiconductors. Methods for texturing are also disclosed. The textured polycrystalline semiconductors have reduced reflectance of light incidence.
Claims11
A composition comprising one or more alkaline compounds, one or more sources of fluoride ions, one or more sources of oxidizing agents and a pH of less than 7.
A method comprising:
- a) providing a polycrystalline semiconductor wafer;
- and
- b) contacting the polycrystalline semiconductor wafer with a composition comprising one or more alkaline compounds, one or more sources of fluoride ions, one or more sources of oxidizing agents and a pH of less than 7 to isotropically etch the non-doped semiconductor wafer.
Dependencies are inferred from the claim text.