Vacuum System Cold Trap Filter

An ion implantation system, comprising:

• an ion source chamber;
• a material source configured to provide one or more chemical species to the ion source chamber;
• a power supply configured to ionize the one or more chemical species within the ion source chamber;
• an extraction assembly configured to extract ions from the ion source chamber, therein defining an ion beam;
• a high vacuum pump in fluid communication with the ion source chamber;
• a roughing pump having an intake in fluid communication with an exhaust of the high vacuum pump;
• and
• one or more cold trap filter assemblies disposed between the roughing pump and the high vacuum pump, each cold trap filter assembly comprising:
• a canister in fluid communication with the exhaust of the high vacuum pump and the intake of the roughing pump;
• a coolant source;
• and
• one or more paddles positioned within the canister, wherein the one or more paddles comprise one or more cooling lines in fluid communication with the coolant source, wherein the coolant source is configured to selectively pass a coolant through the one or more cooling lines, therein selectively cooling the paddle to a predetermined temperature associated with a condensation point and/or deposition point of one or more of the one or more chemical species at the position of the one or more paddles.

A method for filtering material in an ion implantation vacuum system, the method comprising:

• providing a high vacuum via a high vacuum pump to an ion source chamber having one or more chemical species disposed therein;
• providing a roughing pump downstream of the ion source chamber, wherein a pressure differential is formed between an exhaust of the high vacuum pump and atmosphere;
• positioning one or more paddles within a vacuum line connecting the an intake of the roughing pump to the exhaust of the high vacuum pump;
• cooling the one or more paddles to a predetermined temperature associated with a condensation point and/or deposition point of one or more of the one or more chemical species at the position of the respective one or more paddles, therein condensing and/or depositing the one or more of the one or more chemical species on the one or more paddles.