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US 2012/0267545 A1Published application
Processing system
AssigneeCarl Zeiss NTS GmbH
InventorFabian Perez-Willard
Life of this patent
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Abstract
A processing system includes a piping which extends annularly, such as in the form of a circular annular shape, around a beam path between a focusing lens and an interaction region. The piping includes, on a side which faces the interaction region, a plurality of exit openings for the gas towards the interaction region. The piping also includes a holder configured to pivot the piping about a pivot axis. The holder is parallel to the tilt axis of the object holder.
Claims20
A system, comprising:
- a first particle beam column comprising a focusing lens configured to focus a first particle beam along a first beam path to an interaction region;
- an object holder configured to arrange an object in the interaction region, the object holder being configured to tilt the object relative to the first particle beam column about a tilt axis transverse to a direction of the first beam path;
- and
- a gas supply arrangement comprising a piping and a gas supply line,
- wherein:
- a first end of the gas supply line is coupleable to a gas reservoir;
- a second end of the gas supply line opens into the piping so that the gas supply line is configured to supply gas from the gas reservoir to the piping;
- the piping extends annularly around the first beam path between the focusing lens and the interaction region;
- the piping has a plurality of openings on a side facing the interaction region so that gas exiting the openings is oriented towards the interaction region;
- and
- the piping comprises a holder configured to pivot the piping about a pivot axis parallel to the tilt axis.
8 more elements
A system, comprising:
- a first particle beam column comprising a focusing lens configured to focus a first particle beam along a first beam path to an interaction region of an object, the object being tiltable about a tilt axis transverse to a direction of the first beam path;
- and
- a gas supply arrangement comprising a piping,
- wherein:
- the piping extends annularly around the first beam path between the focusing lens and the interaction region;
- the piping has a plurality of openings on a side facing the interaction region so that a gas exiting the openings is oriented towards the interaction region;
- and
- the piping is pivotable about a pivot axis parallel to the tilt axis.
5 more elements
A system, comprising:
- a first particle beam column comprising a focusing lens configured to focus a first particle beam along a first beam path to an interaction region an object, the object being tiltable about a tilt axis transverse to a direction of the first beam path;
- a second particle beam column having a focusing lens configured to direct a second particle beam along a second beam path to the interaction region;
- and
- a gas supply arrangement comprising a piping,
- wherein:
- the piping extends annularly around the first beam path between the focusing lens and the interaction region;
- the piping has a plurality of openings on a side facing the interaction region so that a gas exiting the openings is oriented towards the interaction region;
- and
- the piping is pivotable about a pivot axis parallel to the tilt axis.
6 more elements
Dependencies are inferred from the claim text.