Gas analyzer
AssigneeHORIBA STEC, Co., Ltd.
InventorsKohei Sasai, Said Boumsellek
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AssigneeHORIBA STEC, Co., Ltd.
InventorsKohei Sasai, Said Boumsellek
Estimating the term…
The present invention is directed to a gas analyzer that hardly generates noise peaks and facilitates reading of a molecular peak, even when a low-molecular-weight alkane is an analysis target. The analyzer analyzes an alkane of the carbon number 1 through 12 contained in a sample gas as an analysis target. The analyzed includes an ionization module for ionizing the sample gas by thermoelectrons having energy of 10 through 30 eV, an ion extraction electrode for extracting ions from the ionization module, a quadrupole module for selectively passing the ions extracted from the ionization module by the ion extraction electrode, through the quadrupole module, and an ion detection module for detecting the ions passed through the quadrupole module.
A gas analyzer for analyzing an alkane of a carbon number of 1 through 12 contained in a sample gas as an analysis target, comprising:
A method of analyzing an alkane of a carbon number of 1 through 12 contained in a sample gas as an analysis target, comprising:
Dependencies are inferred from the claim text.