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US 2012/0267280 A1Published application
Vessel for molten semiconducting materials and methods of making the same
OwnerGlen Bennett Cook, Kenneth Edward Hrdina +2inventors
InventorsGlen Bennett Cook, Kenneth Edward Hrdina, Christopher Scott Thomas, John Forrest Wight, JR.
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Abstract
The disclosure relates to vessels configured to contain molten semiconducting materials. The vessels include a high purity fused silica lining having a base and sidewalls that define an interior volume, and a fused silica backing proximate the external surfaces of the lining
Claims20
A vessel configured to contain a molten semiconducting material, the vessel comprising:
- a lining comprising a first fused silica, said lining having a base and sidewalls defining an interior volume;
- and
- a backing comprising a second fused silica proximate to external surfaces of the lining, wherein
- the lining has a total impurity content of 100 ppbw or less, and
- a porosity of the first fused silica is less than a porosity of the second fused silica.
2 more elements
A method of making a vessel configured to contain a molten semiconducting material, the method comprising:
- forming a lining comprising a first article of fused silica, said lining having a base and sidewalls defining an interior volume;
- and
- forming a backing comprising a second article of fused silica proximate to external surfaces of the lining, wherein
- the lining has a total impurity content of 100 ppbw or less, and
- a porosity of the first fused silica is less than a porosity of the second fused silica.
2 more elements
Dependencies are inferred from the claim text.