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US 2012/0267223 A1Published application
Bistable nanoswitch
AssigneeNortheastern University
InventorsSivasubramanian Somu, Ahmed Busnaina, Nicol McGruer, Peter Ryan, George G. Adams, Xugang Xiong, Taehoon Kim
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Abstract
A non-volatile bistable nano-electromechanical switch is provided for use in memory devices and microprocessors. The switch employs carbon nanotubes as the actuation element. A method has been developed for fabricating nanoswitches having one single-walled carbon nanotube as the actuator. The actuation of two different states can be achieved using the same low voltage for each state.
Claims20
A method of integrating a single nanowire into a nanocircuit, the method comprising the steps of:
- providing a nanosubstrate, a surface of the nanosubstrate comprising two conductive terminals separated by an insulating area;
- adding a liquid suspension of nanotubes to the surface of the nanosubstrate to cover the conductive terminals;
- performing dielectrophoresis by applying a voltage between the first and second conductive terminals;
- and
- removing excess nanotubes using a stream of gas, whereby only one nanotube remains in electrical contact with both conductive terminals.
2 more elements
Dependencies are inferred from the claim text.