Method of forming multi-layer graphene
AssigneeSamsung Electronics Co., Ltd.
InventorsYun-sung Woo, Jae-young Choi, Won-mook Choi, Hyeon-jin Shin, Seon-mi Yoon
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Abstract
A method of forming a multi-layer graphene includes forming a stack of a graphitizing metal catalyst layer and graphene by repeatedly performing a cycle of first forming the graphitizing metal catalyst layer on a substrate, and then forming the graphene on the graphitizing metal catalyst layer, and removing the graphitizing metal catalyst layer.
Claims20
A method of forming a multi-layer graphene, the method comprising:
- forming a stack of a graphitizing metal catalyst layer and graphene by repeatedly performing a cycle of first forming the graphitizing metal catalyst layer on a substrate, and then forming the graphene on the graphitizing metal catalyst layer;
- and
- removing the graphitizing metal catalyst layer.
A method of forming a multi-layer graphene, the method comprising:
- forming a stack of a graphitizing metal catalyst layer and graphene by repeatedly performing a cycle of first forming the graphitizing metal catalyst layer over a first substrate, and then forming the graphene on the graphitizing metal catalyst layer;
- forming a polymer support on the graphene;
- separating the stack of the graphitizing metal catalyst layer and the graphene and the polymer support from the first substrate;
- removing the graphitizing metal catalyst layer to form a stack of the graphene and the polymer support;
- transferring the stack of the graphene and the polymer support onto a second substrate;
- and
- removing the polymer support.
A method of forming a multi-layer graphene, the method comprising:
- forming a block layer on a substrate;
- patterning the block layer to form a patterned block layer;
- forming a stack of a graphitizing metal catalyst layer and graphene by repeatedly performing a cycle of first forming the graphitizing metal catalyst layer over the patterned block layer and then forming the graphene on the graphitizing metal catalyst layer;
- removing the patterned block layer;
- and
- removing the graphitizing metal catalyst layer.
A method of forming a patterned multi-layer graphene, the method comprising:
- forming a block layer on a first substrate;
- patterning the block layer to form a patterned block layer;
- forming a stack of a graphitizing metal catalyst layer and graphene by repeatedly performing a cycle of first forming the graphitizing metal catalyst layer over the first substrate including the patterned block layer formed thereon and then forming the graphene on the graphitizing metal catalyst layer;
- removing the patterned block layer;
- forming a polymer support on the graphene;
- separating the stack of the graphitizing metal catalyst layer and the graphene and the polymer support from the first substrate;
- removing the graphitizing metal catalyst layer;
- transferring the stack of the graphene and the polymer support onto a second substrate;
- and
- removing the polymer support.
A method of forming a multi-layer graphene, the method comprising:
- placing a substrate into a process chamber, the substrate including a graphitizing metal catalyst layer formed thereon;
- forming a graphene stack structure on the graphitizing metal catalyst layer by simultaneously providing a vaporous carbon supplier to the process chamber and heat treating the graphitizing metal catalyst layer;
- and
- removing the graphitizing metal catalyst layer.
Dependencies are inferred from the claim text.