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US 2012/0266953 A1Published application
Method of coating a substrate
AssigneeOerlikon Solar AG, Trubbach
InventorsDaniel Borrello, Evelyne Vallat-Sauvain, Ulrich Kroll, Johannes Meier
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Abstract
The present invention provides a method of coating a substrate with a zinc oxide film, the method comprising the steps of: Providing a substrate with at least one substantially flat surface; Subjecting said surface at least partially to a plasma-etching process; Depositing a layer on said etched surface, the layer comprising zinc oxide. The method according to the invention is particularly suitable for manufacturing solar cells with an improved efficiency.
Claims10
A method of coating a substrate with a zinc oxide film, the method comprising the steps of:
- providing a substrate with at least one substantially flat surface;
- subjecting said surface at least partially to a plasma-etching process;
- and depositing a layer on said etched surface, the layer comprising zinc oxide.
Dependencies are inferred from the claim text.