Atmospheric film-coating device and film-manufacturing apparatus
AssigneeCreating Nano Technologies, Inc.
InventorsYih-Ming SHYU, Yan-Gen CHEN, Shih-Ming HUANG, Chun-Chia YEH, Pei-Lin CHEN, Shih-Huan LIN
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Abstract
An atmospheric film-coating device and a film-manufacturing apparatus are described. The atmospheric film-coating device includes a delivery device and a nebulization device. The delivery device is suitable for delivering at least one substrate. The nebulization device is used to gasify a film coating solution toward a direction indirectly to the at least one substrate into a plurality of film coating vapor molecules to deposit on a surface of the at least one substrate.
Claims20
An atmospheric film-coating device, including:
- a delivery device suitable for delivering at least one substrate;
- and
- a nebulization device used to gasify a film coating solution toward a direction indirectly to the at least one substrate into a plurality of film coating vapor molecules to deposit on a surface of the at least one substrate.
A film-manufacturing apparatus, including:
- a delivery device suitable for delivering at least one substrate;
- a plasma device disposed over the delivery device and suitable for performing a surface activation treatment on a surface of the at least one substrate;
- and
- an atmospheric coating device adjacent to the plasma device, wherein the atmospheric coating device includes a nebulization device used to gasify a film coating solution toward a direction indirectly to the surface of the at least one substrate into a plurality of film coating vapor molecules to deposit on the surface of the at least one substrate.
Dependencies are inferred from the claim text.