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US 2012/0266813 A1Published application
Mask Frame Assembly for Thin Film Deposition
AssigneeSamsung Mobile Display Co., Ltd.
InventorJeremy Hong
Life of this patent
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Abstract
A mask frame assembly for depositing a deposition material on a deposition substrate comprises a mask frame including an opening and frames surrounding the opening, and a mask coupled on the mask frame. A deformation prevention unit is formed on at least one region of the mask. Since the deformation prevention unit is formed on a peripheral portion of a deposition pattern in the mask, deformation of the mask in a vertical direction may be reduced. Accordingly, defective attaching of the mask to the substrate may be reduced.
Claims17
A mask frame assembly for a thin film deposition, the mask frame assembly comprising:
- a mask frame including an opening and frames surrounding the opening;
- and
- a mask coupled to the mask frame;
- wherein a deformation prevention unit is formed on at least one region of the mask.
1 more element
Dependencies are inferred from the claim text.