Position measuring instrument, scale, and method for producing a scale
AssigneeDr. Johannes Heidenhain GmbH
InventorsAlexander Frank, Marc Oliver Tiemann, Martin Heumann
Life of this patent
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Abstract
A method a scale having an inductively scannable graduation, the scale including a sequence of graduation elements disposed in a measuring direction and a layer stack including a succession of metal layers. The succession of metal layers includes a ferromagnetic metal carrier layer and a graduation layer that forms the sequence of graduation elements. The carrier layer is disposed between the graduation layer and a metal substrate, and the metal substrate is dimensioned to definitively determine mechanical properties of the layer stack.
Claims24
A scale having an inductively scannable graduation, the scale comprising:
- a sequence of graduation elements disposed in a measuring direction;
- and
- a layer stack comprising a succession of metal layers, wherein said succession of metal layers comprises a ferromagnetic metal carrier layer and a graduation layer that forms said sequence of graduation elements;
- and
- wherein said carrier layer is disposed between said graduation layer and a metal substrate, and said metal substrate is dimensioned to definitively determine mechanical properties of said layer stack.
A position measuring instrument, comprising:
- a scale having an inductively scannable graduation, said scale comprising:
- a sequence of graduation elements disposed in a measuring direction;
- and
- a layer stack comprising a succession of metal layers, wherein said succession of metal layers comprises a ferromagnetic metal carrier layer and a graduation layer that forms said sequence of graduation elements;
- and
- wherein said carrier layer is disposed between said graduation layer and a metal substrate, and said metal substrate is dimensioned to definitively determine mechanical properties of said layer stack;
- a scanning unit for scanning said sequence of graduation elements, wherein said scanning unit comprises:
- an excitation unit that generates an electromagnetic alternating field;
- and
- a detector unit that detects said electromagnetic alternating field modulated by said sequence of graduation elements as a function of position.
A method for producing a scale having a sequence of graduation elements disposed in a measuring direction, the method comprising:
- forming a layer stack which comprises a succession of metal layers, wherein said succession of metal layers comprises a ferromagnetic metal carrier layer and a graduation layer that forms a sequence of graduation elements;
- and
- creating a composite so that a layer sequence of metal substrate, said ferromagnetic metal carrier layer and said graduation layer is created.
Dependencies are inferred from the claim text.