Retargeting for Electrical Yield Enhancement

A computer program product comprising a computer readable storage medium having a computer readable program stored therein, wherein the computer readable program, when executed on a computing device, causes the computing device to:

• perform optical proximity correction on a set of target patterns in order to produce a set of optical proximity correction mask shapes;
• generate a set of lithographic contours for each of the set of optical proximity correction mask shapes;
• determine electrical yield sensitivities for at least one shape in a set of shapes in the set of target patterns;
• determine an amount and a direction of retargeting for each of the at least one shape in the set of shapes based on the electrical yield sensitivity of the shape;
• and
• generate a new set of target patterns with retargeted edges for each shape in the at least one shape based on the amount and the direction of retargeting.

An apparatus, comprising:

• a processor;
• and
• a memory coupled to the processor, wherein the memory comprises instructions which, when executed by the processor, cause the processor to:
• perform optical proximity correction on a set of target patterns in order to produce a set of optical proximity correction mask shapes;
• generate a set of lithographic contours for each of the set of optical proximity correction mask shapes;
• determine electrical yield sensitivities for at least one shape in a set of shapes in the set of target patterns;
• determine an amount and a direction of retargeting for each of the at least one shape in the set of shapes based on the electrical yield sensitivity of the shape;
• and
• generate a new set of target patterns with retargeted edges for each shape in the at least one shape based on the amount and the direction of retargeting.