Designed-based yield management system
OwnerChenmin Hu, Bo Su +3inventors
InventorsChenmin Hu, Bo Su, Ping Zhang, Yuan Xu, Qing Zhang
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OwnerChenmin Hu, Bo Su +3inventors
InventorsChenmin Hu, Bo Su, Ping Zhang, Yuan Xu, Qing Zhang
Estimating the term…
An integrated-circuit yield improvement system includes a global signature analysis/grouping module configured to receive an integrated circuit (IC) design and identify areas in the IC design that include potential defect signatures based on the defect signatures stored in the defect signature library. The global signature analysis/grouping module can produce a global signature map indicating these areas and their associated potential defect signatures in the IC design. A local signature analysis/grouping module can identify and group local defect signatures in the IC design with the process monitoring and yield data as input, to output grouped local signatures. An intelligent learning engine can analyze the global signature map and the grouped local signatures and update some of the defect signatures in the defect signature library. A feedback loop is formed to update and renew the contents of the defect signature library for each new IC design while process and yield are improved.
An integrated-circuit yield improvement system, comprising:
An integrated-circuit yield improvement system, comprising:
A computer-implemented method for improving manufacturing yield in an integrated circuit, comprising:
Dependencies are inferred from the claim text.