Substrate processing apparatus, method for manufacturing solar battery, and method for manufacturing substrate

A method for manufacturing a CIS-based solar battery, comprising:

• loading a plurality of substrates with a laminated film composed of any one of copper-indium, copper-gallium, or copper-indium-gallium, into a processing chamber formed inside a reaction tube with its base made of a metal material;
• processing the plurality of substrates by heating the processing chamber and introducing elemental selenium-containing gas or elemental sulfur-containing gas into the processing chamber, for selenization or sulfurization of the plurality of substrates;
• and
• unloading the plurality of substrates after exhausting the elemental selenium-containing gas or the elemental sulfur-containing gas in the processing chamber.

A method for manufacturing substrates, comprising:

• loading a plurality of substrates with a laminated film composed of any one of copper-indium, copper-gallium, or copper-indium-gallium, into a processing chamber formed inside a reaction tube with its base made of a metal material;
• processing the plurality of substrates by heating the processing chamber and introducing elemental selenium-containing gas or elemental sulfur-containing gas into the processing chamber, for selenization or sulfurization of the plurality of substrates;
• and
• unloading the plurality of substrates after exhausting the elemental selenium-containing gas or the elemental sulfur-containing gas in the processing chamber.