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US 2012/0258401 A1Published application
Resist composition and method for producing resist pattern
AssigneeSumitomo Chemical Company, Limited
InventorsKoji ICHIKAWA, Takahiro YASUE, Yuichi MUKAI
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Abstract
A resist composition contains (A) a resin being insoluble or poorly soluble in alkali aqueous solution, but becoming soluble in an alkali aqueous solution by the action of an acid, (B) an acid generator represented by the formula (II), and (D) a compound represented by the formula (I), wherein R1 and R2, m and n, R3 and R4, X1, R5 and Z1+ are defined in the specification.
Claims4
A resist composition comprising
- (A) a resin being insoluble or poorly soluble in alkali aqueous solution, but becoming soluble in an alkali aqueous solution by the action of an acid,
- (B) an acid generator represented by the formula (II), and
- (D) a compound represented by the formula (I),
- wherein R1 and R2 in each occurrence independently represent a C1 to C12 hydrocarbon group, a C1 to C6 alkoxyl group, a C2 to C7 acyl group, a C2 to C7 acyloxy group, a C2 to C7 alkoxycarbonyl group, a nitro group or a halogen atom;
- m and n independently represent an integer of 0 to 4;
- wherein R3 and R4 independently represent a fluorine atom or a C1 to C6 perfluoroalkyl group;
- X1 represents an C1 to C17 divalent saturated hydrocarbon group, and one or more hydrogen atom contained in the divalent saturated hydrocarbon group may be replaced by a fluorine atom, one or more —CH2— contained in the divalent saturated hydrocarbon group may be replaced by —O— or —CO—;
- R5 represents a group having cyclic ether structure;
- and
- Z1+ represents an organic cation.
7 more elements
Dependencies are inferred from the claim text.